KLS Series Vacuum High-Low Temperature Radiation-Resistant Linear Module | Used for Semiconductor Three-Temperature Testing

Core Perspective: Solving "thermal shock-induced jamming and precision drift" in three-temperature testing
In semiconductor three-temperature testing, chips are often rapidly transferred from a liquid nitrogen environment at -196°C to a high-temperature test zone at +200°C – a temperature swing of nearly 400°C. Standard linear modules frequently suffer from material mismatch under such drastic thermal shock, leading to "jamming" or "stick-slip" behavior that interrupts testing or damages expensive probe cards. The KLS Series Vacuum High-Low Temperature Radiation-Resistant Linear Module is specifically engineered to overcome this challenge. This vacuum high-low temperature radiation-resistant linear module utilizes specialized anti-galling materials for its leadscrews and guideways, ensuring no brittle fracture at min -196°C while maintaining adequate hardness and stiffness at max +200°C. When the test chamber is evacuated to a high vacuum degree of 10^-7Pa, conventional greases would rapidly outgas and disappear. To counter this, this vacuum high-low temperature radiation-resistant linear module employs ceramic-based dry film lubrication, completely eliminating lubrication failure caused by alternating high and low temperatures.
More critically, the radiation aging test within three-temperature testing requires the module to withstand radiation intensity of 10^6Gy without becoming brittle. Therefore, the KLS Series Vacuum High-Low Temperature Radiation-Resistant Linear Module features radiation-hardened cable jackets and encoder code discs. In terms of mechanical specifications, this vacuum high-low temperature radiation-resistant linear module is offered in body widths of 30/40/60/80/135/170 mm, with the 60mm and 80mm widths being the most common configurations for probe stations. Its maximum load capacity of horizontal 150kg and vertical 100kg is sufficient to support ceramic heating chucks loaded with multiple wafers. The repeatability of ±0.01mm ensures precise alignment between probe tips and bond pads.
In a typical burn-in test system, the vacuum high-low temperature radiation-resistant linear module undergoes dozens of cycles from low to high temperature daily, each accompanied by drastic vacuum fluctuations. The bellows seal structure of this vacuum high-low temperature radiation-resistant linear module effectively balances internal and external pressure differentials. Moreover, the compact body width of 30mm allows dense packing within multi-site parallel test handlers. Additionally, this vacuum high-low temperature radiation-resistant linear module features a nitrogen purge port to prevent condensation on chamber walls at low temperatures, which could otherwise impair optical alignment. For automotive-grade chip three-temperature testing, every sample requires full traceability. The KLS Series Vacuum High-Low Temperature Radiation-Resistant Linear Module integrates position feedback that uploads displacement data at each temperature setpoint to the MES system. In conclusion, whether facing the cryogenic shock of -196°C, prolonged baking at +200°C, or high-energy particle bombardment at 10^6Gy, this vacuum high-low temperature radiation-resistant linear module consistently delivers stable output with ±0.01mm precision, thoroughly resolving the industry's long-standing pain point of temperature-induced motion failure.