Vacuum Environment Solutions

Stepper motors for operations in vacuum, cryogenic, high temperature and radiation applications

Vacuum: up to 10^-7Pa

 Operating temperature: down to -196℃ , up to 200℃

Radiation resistance:  up to 10⁶Gy

Motor Flange: 28/42/57/86mm ( Nema 11/17/23/34） 

Holding torque: 0.04 to 4.4Nm

Basic step angle:  1.8° with accuracy of 5%

 Lubrication: grease or dry lubrication

 resolver feedback, safe brake, double shaft, modified shaft

Vacuum: up to 10^-7Pa

Cryo-temperature: down to -196℃

High temperature: up to 260°C

Radiation resistance: up to 10⁶Gy

Rated power: 400/750/1800/3800W

Rated torque: 0.32Nm to 15Nm

Rated speed: 2500rpm or 3000rpm

Winding voltage: 48VDC, 110VDC, 220VAC, or 380VAC

Feedback device: resolver

Flange dimension: 60/80/110/130mm

Servo motors for operations in vacuum, cryogenic and high temperature applications

Vacuum: up to 10^-3Pa

Operating temperature: down to -60℃ , up to 120℃

Rated power: 100/200/400/750/1000/1800/3800W 

Winding voltage: 24VDC/48VDC/220VAC/380VAC

Feedback device: resolver, geared multi-turn absolute encoder

Options: safe brake

Multiple Control Interfaces: Featuring pulse/direction, RS485 (Modbus RTU), EtherCAT, and CANopen, this servo drive enables seamless communication and precise command delivery to connected servo motors.

Wide Environmental Adaptability: Engineered for reliability across different settings, this servo drive operates in standard environments (0–40°C) as well as extreme conditions (-40 to +70°C, 95% humidity, vibration, and shock), ensuring consistent performance when paired with compatible servo motors.

Versatile Power Options: This servo drive supports DC24/48V and AC220/380V inputs, providing flexible power solutions for a wide range of servo motors across different system architectures.

Diverse Command Modes: In addition to digital communication, this servo drive supports analog voltage control for speed or torque, offering versatile operation modes to suit various servo motor applications.

Flexible Feedback Compatibility: Designed to work with both resolver and multi-turn absolute encoder feedback, this servo drive ensures accurate position, speed, and torque control for KECM and KSSM series servo motors.CANopen

High Load Capacity: With a load capacity of up to 60 kg, this rotation stage delivers stable and precise rotary motion even under substantial payloads.

Versatile Applications: Widely used across biomedical research, semiconductor manufacturing, 3C electronics production, automotive testing, in-vacuum processing, military and aerospace, nuclear energy, scientific instrumentation, and general automation, this rotation stage is built to excel in the most demanding sectors.

Multiple Diameter Options: Available in diameters of 60mm, 100mm, and 160mm, this rotation stage offers flexible sizing to accommodate diverse application requirements.

Extreme-Environment Compatibility: This rotation stage is engineered for demanding conditions, including vacuum, cryogenic temperatures, high heat, and radiation, ensuring reliable performance in harsh industrial and scientific environments.

Precision & Durability: Featuring a compact structure and high accuracy, this rotation stage provides exceptional repeatability and a long service life, making it ideal for mission-critical operations.

Torque Multiplication: By effectively increasing motor torque, this planetary gearbox optimizes mechanical transmission systems and enables handling of high-load applications with ease.

Versatile Application Scope: Widely used in semiconductor manufacturing, biomedical equipment, aerospace, nuclear facilities, and general automation, this planetary gearbox is the ideal choice for extreme-environment motion control systems.

Advanced Design & Materials: Utilizing high-quality materials, advanced structural designs, and cutting-edge lubrication technologies, this planetary gearbox delivers reliable performance in the most demanding conditions.

High Rigidity & Durability: Engineered for exceptional rigidity and stability, this planetary gearbox maintains accuracy under heavy loads and harsh operating environments.

Enhanced Precision & Control: This planetary gearbox provides superior step resolution and optimal inertia ratios, ensuring precise movements and improved system efficiency.

Extreme-Environment Compatibility: This planetary gearbox is engineered to withstand cryogenic temperatures down to -196°C, high temperatures up to +200°C, vacuum levels as low as 10⁻⁷ Pa, and radiation exposure up to 10⁶ Gy.